Quantitative correlation of infrared absorption with nuclear magnetic resonance measurements of hydrogen content in diamond films
- 1 September 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (5) , 3143-3148
- https://doi.org/10.1116/1.577834
Abstract
Hydrogen concentrations in polycrystalline diamond films were found to correlate well with the integrated intensity of the CH-stretch region in the infrared (IR) spectrum for films with a total hydrogen content <0.10 at. %. Comparison of IR to nuclear magnetic resonance (NMR) measurements yielded an effective absorption coefficient for the CH-stretch region of 4.3±0.8×103 ℓ mol−1 cm−2, similar to literature values for condensed-phase hydrocarbons. In several films, the dominant stretch modes occur at ∼2850 and 2920 cm−1, typical of CH2 groups. The presence of these modes is accompanied by an increase in the Gaussian linewidth in the NMR spectrum, indicating a decrease in the interproton spacings within the film. In films with higher total hydrogen contents, a simple linear relationship between hydrogen content and intensity in the CH-stretch region is no longer applicable.Keywords
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