Excimer laser assisted chemical machining of SiC ceramic
- 13 February 1995
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 66 (7) , 817-818
- https://doi.org/10.1063/1.113431
Abstract
A highly effective method of machining ceramic has been newly developed using a krypton fluoride (KrF) excimer laser with a 248 nm wavelength. The laser was irradiated on SiC in water to form a soft hydrous oxide layer by photochemical reaction. The softened layer was then cut with a diamond tool to form a mirror surface finish. The optimum conditions were found for both high machining rate and better surface integrity of SiC.Keywords
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