Texture of titanium self-aligned silicide (salicide)
- 1 July 1996
- journal article
- Published by Elsevier in Scripta Materialia
- Vol. 35 (1) , 53-58
- https://doi.org/10.1016/1359-6462(96)00103-0
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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