A performance comparison of vacuum deposition monitors employing atomic absorption (AA) and electron impact emission spectroscopy (EIES)
- 1 April 1983
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 1 (2) , 252-256
- https://doi.org/10.1116/1.572106
Abstract
A review of the fundamental properties of the newer deposition monitoring techniques is combined with an experimental comparison of atomic absorption (AA) and electron impact emission spectroscopy (EIES). The results presented show that EIES has practical advantages when stability and sensitivity are the dominant requirements. However, when operation over wide pressure ranges is necessary the superior selectivity of AA is shown to have advantages.Keywords
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