Vacuum evaporated silicon layers free from stacking faults

• 1 September 1963
• journal article
• other
• Published by Taylor & Francis in Philosophical Magazine
• Vol. 8  (93) , 1597-1598
• https://doi.org/10.1080/14786436308207323

Abstract

Keywords

• VACUUM EVAPORATED
• EVAPORATED SILICON
• SILICON LAYERS
• LAYERS FREE
• STACKING FAULTS