Developments in electron image projection
- 1 November 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (6) , 1830-1833
- https://doi.org/10.1116/1.570305
Abstract
Unity magnification electron image projection shows considerable promise in lithography of VLSI the developments discussed are an extension to the alignment system to correct magnification, an automatic alignment technique for magnetic bubble circuits and an improved electrostatic chuck.Keywords
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