New V-groove double-diffused m.o.s. (v.d.m.o.s.)
- 11 November 1976
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 12 (23) , 605
- https://doi.org/10.1049/el:19760461
Abstract
A new V-groove double-diffused m.o.s. (v.d.m.o s.) is proposed which combines the V-groove technology and the double-diffused m.o.s. (d.m.o.s.) technology. The fabrication processes arc qualitatively described. The gate is located on the vertical V-shaped surface, and the effective channel length is controlled by the vertical-diffusion process of the double-diffusion step. The v.d.m.o.s. is expected to have a faster speed and higher production yield than the ordinary d.m.o.s.Keywords
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