Modeling inductively coupled plasmas: The coil current boundary condition
- 15 January 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (2) , 656-661
- https://doi.org/10.1063/1.347345
Abstract
In modeling inductively coupled plasmas, the boundary condition for the electromagnetic field equations can be treated by specifying either the current in the induction coil or the total power dissipated in the plasma. This paper presents a method for using the coil current boundary condition. An advantage of using the coil current boundary condition is that coil current, unlike plasma power dissipation, is easily measured; in this approach the plasma power dissipation is an outcome of the calculation. The results of sample calculations are presented, covering a range of coil currents from 59 to 110 A. The conditions of the calculations correspond to experimental argon plasmas at atmospheric pressure and at 3.0 MHz frequency. The calculated isotherms are in good qualitative agreement with photographs of the laboratory plasmas.This publication has 10 references indexed in Scilit:
- Modeling of RF plasma torch with a metallic tube inserted for reactant injectionPlasma Chemistry and Plasma Processing, 1991
- Radio-frequency induction plasmas at atmospheric pressure: Mixtures of hydrogen, nitrogen, and oxygen with argonPlasma Chemistry and Plasma Processing, 1990
- Two-dimensional electromagnetic field effects in induction plasma modellingPlasma Chemistry and Plasma Processing, 1989
- The effect of coil design on materials synthesis in an inductively coupled plasma torchJournal of Applied Physics, 1988
- Theoretical Prediction of the Effect of Coil Configuration on Gas Mixing in an Inductively Coupled Plasma TorchMRS Proceedings, 1987
- New design of a radio-frequency plasma torchPlasma Chemistry and Plasma Processing, 1981
- Flow and Temperature Fields in the Fire-Ball of an Inductively Coupled PlasmaIEEE Transactions on Plasma Science, 1976
- Energy-Transfer Mechanism and Typical Operating Characteristics for the Thermal rf Plasma GeneratorJournal of Applied Physics, 1968
- Measurement of Emission and Absorption of Radiation by an Argon PlasmaPhysics of Fluids, 1967
- Induction-Coupled Plasma TorchJournal of Applied Physics, 1961