Excimer ultraviolet gas-discharge XeF, XeCl, and KrF lasers

• 31 January 1977
• journal article
• Published by IOP Publishing in Soviet Journal of Quantum Electronics
• Vol. 7  (1) , 131-133
• https://doi.org/10.1070/qe1977v007n01abeh008848

Abstract

Keywords

• EXCIMER ULTRAVIOLET
• ULTRAVIOLET GAS
• XECL
• GAS DISCHARGE
• DISCHARGE XEF
• KRF LASERS