Initial results for a quadrupole mass spectrometerwith a silicon micromachined mass filter

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Abstract
Initial results are presented from tests of a low voltage, low power, miniature quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of the device is discussed, along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of the lens including a mass spectrum for an argon/air mixture and the effect of cage voltage, emission current and pressure on the performance.

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