Influence of the deposition gas mixture on the structure and failure modes of diamondlike carbon films

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Abstract
Diamondlike carbon films have been deposited from binary mixtures of 1,3 butadiene and hydrogen or argon in a radio-frequency parallel plate plasma reactor. An infrared spectroscopic analysis revealed some of the effects of the diluents (hydrogen and argon) on the bonding characteristics of the deposited films. The film properties are a strong function of the deposition gas mixture. Hydrogen and argon both increase the diamondlike behavior. However, there is a trade-off between enhanced diamondlike characteristics and a tendency to delaminate or crack due to excessive stress and poor adhesion. The failure modes and stress relief forms have been imaged by the Nomarski interference contrast technique. Two new stress relief forms have been observed.
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