Bottom electrodes for integrated Pb(Zr, Ti)O3 films

• 1 November 1992
• journal article
• Published by Taylor & Francis in Integrated Ferroelectrics
• Vol. 2  (1-4) , 311-325
• https://doi.org/10.1080/10584589208215751

Abstract

Keywords

• FERROELECTRIC
• PLATINUM
• BOTTOM ELECTRODES
• PZT
• SPUTTER DEPOSITION
• PHASE STABILITY
• AUGER