Medium permittivity bismuth zinc niobate thin film capacitors

Abstract
Thin films were fabricated via metalorganic decomposition methods with three compositions: Bi1.5Zn1.0Nb1.5O7, Bi1.5Zn0.5Nb1.5O6.5, and Bi2Zn2/3Nb4/3O7. The Bi1.5Zn0.5Nb1.5O6.5 composition is a low temperature phase with the cubic pyrochlore structure. This phase may undergo a peritectoid decomposition at 700 °C to the high temperature phases of Bi1.5Zn1.0Nb1.5O7 and BiNbO4. Both the Bi1.5Zn1.0Nb1.5O7 and Bi1.5Zn0.5Nb1.5O6.5 cubic pyrochlores show medium room temperature permittivities (150 and 180, respectively) with negative temperature coefficients of capacitance and a low temperature dielectric relaxation. Both Bi1.5Zn1.0Nb1.5O7 and Bi1.5Zn0.5Nb1.5O6.5 films showed substantial dielectric tunability with electric field (>30%). The field dependence of the dielectric permittivity of the zirconolite structured Bi2Zn2/3Nb4/3O7 thin films demonstrates an unusual field induced transition at high field ∼2 MV/cm, with a maximum tunability of 20%. It is hypothesized that this is associated with field forced ordering of the Zn atoms between two closely spaced, partially occupied sites.