Wafer scale patterning by soft UV-Nanoimprint Lithography

• 1 June 2004
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 73-74, 167-171
• https://doi.org/10.1016/j.mee.2004.02.035

Abstract

Keywords

• NANOIMPRINT
• SOFT LITHOGRAPHY
• UV-NANOIMPRINT
• PATTERNING ON WAFER SCALE