Correlation between DLTS and Photoluminescence in He-implanted 6H-SiC

• 10 May 2000
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 338-342, 753-756
• https://doi.org/10.4028/www.scientific.net/msf.338-342.753

Abstract

Keywords

• DLTS
• IMPLANTATION-INDUCED DEFECTS
• LTPL