Ion Beam Induced Damage in Epitaxial TiN Films
- 1 August 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (8R) , 1907
- https://doi.org/10.1143/jjap.30.1907
Abstract
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- Ion Beam Induced Damage in Epitaxial TiN FilmsJapanese Journal of Applied Physics, 1991