Relief-type diffraction grating by amorphous chalcogenide films
- 1 November 1975
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 27 (9) , 508-509
- https://doi.org/10.1063/1.88537
Abstract
In As‐Se‐ (S) ‐Ge amorphous films, a remarkable difference of chemical etching rate between the heat‐treated state and the light‐irradiated state has been observed. Utilizing this characteristic, a relief‐type diffraction grating of the amorphous film was obtained (the pitch between grating lines, 0.86 μm). This grating has achieved a high diffraction efficiency of 15.8%, which was about 10 times greater than before chemical etching.Keywords
This publication has 3 references indexed in Scilit:
- Photoexpansion and ``thermal contraction'' of amorphous chalcogenide glassesApplied Physics Letters, 1974
- A reversible optical change in the AsSeGe glassJournal of Non-Crystalline Solids, 1973
- Optically Induced Reversible Change in Amorphous SemiconductorsJapanese Journal of Applied Physics, 1972