Effects of Ion Bombardment upon Microcrystalline Silicon Growth

• 1 November 2001
• journal article
• Published by Trans Tech Publications, Ltd. in Solid State Phenomena
• Vol. 80-81, 71-76
• https://doi.org/10.4028/www.scientific.net/ssp.80-81.71

Abstract

Keywords

• GROWTH MECHANISM
• ION BOMBARDMENT
• MICROCRYSTALLINE SILICON
• PLASMA DEPOSITION
• SPECTROSCOPIC ELLIPSOMETRY (SE)