Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 207-210
• https://doi.org/10.4028/www.scientific.net/msf.264-268.207

Abstract

Keywords

• 3C-SIC
• ANTIPHASE BOUNDARY (APB)
• APCVD
• ETCH-PIT-DENSITY
• HETEROEPITAXY
• LPCVD
• STACKING FAULT
• TWIN