Segmented bimorph deformable mirror
- 1 June 1989
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 22 (6) , 402-405
- https://doi.org/10.1088/0022-3735/22/6/016
Abstract
The efficient low-voltage bending properties of PZT bimorph wafers have been combined with conventional microelectronics techniques to produce a 37-hex-faceted deformable mirror 23 mm in diameter and 1 mm thick. Despite the high ratio of diameter to thickness, at 633 nm an overall flatness of better than one-half wave peak-to-valley (PV) and one-tenth wave RMS is attained under an active figure control of about 7 V per wave. Evaporative deposition of the electrical contact pattern eliminates mechanical coupling to the bimorph and allows the device to perform to frequencies in excess of 10 kHz.Keywords
This publication has 10 references indexed in Scilit:
- National Optical Astronomy Observatories (NOAO) Infrared Adaptive Optics Program I: General DescriptionPublished by SPIE-Intl Soc Optical Eng ,1986
- Bimorph piezoelectric flexible mirror: graphical solution and comparison with experimentJournal of the Optical Society of America, 1983
- Deformable Mirror With Combined Piezoelectric And Electrostatic ActuatorsPublished by SPIE-Intl Soc Optical Eng ,1982
- Bimorph piezoelectric flexible mirrorJournal of the Optical Society of America, 1979
- Analysis of adaptive optical elements made from piezolectric bimorphsJournal of the Optical Society of America, 1979
- Active optics: A new technology for the control of lightProceedings of the IEEE, 1978
- Experimental studies of a deformable-mirror adaptive optical system*Journal of the Optical Society of America, 1977
- Correction of atmospheric distortion with an image-sharpening telescope*Journal of the Optical Society of America, 1977
- The membrane mirror as an adaptive optical element*Journal of the Optical Society of America, 1977
- Analysis of a monolithic piezoelectric mirrorJournal of Applied Physics, 1975