Trajectory calculations of the extraction region of a liquid-metal ion source
- 1 November 1981
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 19 (4) , 1082-1086
- https://doi.org/10.1116/1.571173
Abstract
In the ion‐extraction region of a liquid‐metal (LM) source, several phenomena occur (e.g., electrostatic‐lens action, axial and transverse space‐charge interactions) that have major effects on the performance of the source. In an effort to better understand these effects, a trajectory analysis was made of the ion‐extraction region. The trajectory calculations showed an appreciable increase in beam divergence at a Ga+ source current of only 5 μA.Keywords
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