Solid-Phase-Epitaxial Growth of Ion Implanted Silicon Using CW Laser and Electron Beam Annealing
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Solid-Phase-Epitaxial Growth in Ion-Implanted SiliconPhysica Status Solidi (a), 1982
- Formation of metastable supersaturated solid solutions in ion implanted silicon during solid phase crystallizationApplied Physics Letters, 1982
- Direct observation of laser-induced solid-phase epitaxial crystallization by time-resolved optical reflectivityApplied Physics Letters, 1980
- Laser Annealing of Ion-Implanted SemiconductorsScience, 1979