A silicon subminiature microphone based on piezoresistive polysilicon strain gauges
- 1 April 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 32 (1-3) , 555-559
- https://doi.org/10.1016/0924-4247(92)80043-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon condenser microphone with integrated field-effect transistorSensors and Actuators A: Physical, 1991
- Capabilities and limits of silicon pressure sensorsSensors and Actuators, 1989
- A subminiature condenser microphone with silicon nitride membrane and silicon back plateThe Journal of the Acoustical Society of America, 1989
- Polycrystalline silicon strain sensorsSensors and Actuators, 1985