New type InGaAs/InP heterostructure avalanche photodiode with buffer layer

Abstract
A new type heterostructure avalanche photodiode (HAPD) is proposed and successfully fabricated by liquid phase epitaxy and Zn-diffusion. The HAPD has been made from a successively grown wafer which consists of In 0.53 Ga 0.47 As light absorption layer, InGaAsP buffer layers and InP avalanche multiplication layer on n-InP substrate. Dark current density of 1 × 10 -4 Acm -2 at 0.9 V B is achieved. When illuminating with 1.15 µm light, the diode has a maximum multiplication gain of 880 and an external quantum efficiency of 40%. The quantum efficiency is markedly improved than that of previously reported HAPD.