Cross-sectional transmission electron microscopy of the interfaces between physical vapor deposited TiNx coatings and steel substrates

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Abstract
The functional lifetime of surface coatings for mechanical, tribological, and metallurgical applications is strongly related to their structural and interfacial characteristics. In this study, cross-sectional transmission electron microscopy (XTEM) and electron energy-loss spectroscopy were concurrently employed to investigate the structural and chemical states of the TiN films and interfaces formed during sputter deposition and ion plating. The effects of deposition temperatures and processes on the solid-state interactions between the film and substrate materials are reported. In addition, convergent beam electron diffraction studies were incorporated in the present study to assist in interpreting the XTEM observations. The results show that exposure to high temperatures during ion plating strongly influences the microstructural as well as chemical states of the TiN films and the film–substrate interfaces.

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