Ion Implantation for Surface Engineering

Publisher Website

1 January 1992

book chapter
Published by Springer Nature

p. 83-104
https://doi.org/10.1007/978-94-017-0631-5_5

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

High-Fluence Implantation in Insulators. Part I: Compositional, Mechanical, and Optical Changes
Published by Springer Nature ,1989
Optical effects of ion implantation
Reports on Progress in Physics, 1987