Novel microscopy using stimulated light scattering by laser-induced transient reflecting gratings on metallic surfaces
- 29 April 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (17) , 1839-1841
- https://doi.org/10.1063/1.105074
Abstract
A novel microscopic method, based on the technique of laser-induced transient reflecting gratings, is proposed to monitor ion implantation in silicon by noncontact and nondestructive ways. Some unique advantages of this technique, such as high sensitivity to ion dose and potential real time imaging capability, are demonstrated.Keywords
This publication has 12 references indexed in Scilit:
- Laser-induced surface acoustic waves and photothermal surface gratings generated by crossing two pulsed laser beamsApplied Physics Letters, 1990
- Picosecond dynamics of surface electron transfer processes: Surface restricted transient grating studies of the n-TiO2/H2O interfaceThe Journal of Chemical Physics, 1989
- Reflectivity and Dynamic Gratings in Implanted Si Induced by Picosecond Laser PulsesPhysica Status Solidi (b), 1988
- Optical generation of coherent surface acoustics: an optically based probe of surface structure and dynamicsOptics Letters, 1988
- Ultrafast processes in silicon studied by transient gratingsIEEE Journal of Quantum Electronics, 1986
- Spatially resolved defect mapping in semiconductors using laser-modulated thermoreflectanceApplied Physics Letters, 1985
- Ion implant monitoring with thermal wave technologyApplied Physics Letters, 1985
- Nonlinear reflection properties of germanium associated with thermal effectsApplied Optics, 1978
- Temporary gratings on germaniumApplied Physics Letters, 1974
- OPTICAL EXCITATION OF HIGH-AMPLITUDE SURFACE WAVESApplied Physics Letters, 1970