Laser Induced Chemical Vapour Deposition Of Platinum Spots On Glass
- 10 April 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1022, 81-84
- https://doi.org/10.1117/12.950105
Abstract
Laser induced pyrolytic deposition of platinum spots on glass is studied for different laser powers, beam diameters and irradiation time. Laser powers up to 500 mW give deposition rates of typically 0.5 μm/s. Temperature calculations as a function of the time allows study of the process kinetics according to the thickness and diameter of the spots. Resistivity measurements of platinum lines give comparable values to those of bulk material.Keywords
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