PbTiO/sub 3/ films from metalloorganic precursors
- 1 November 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 35 (6) , 711-717
- https://doi.org/10.1109/58.9327
Abstract
Ferroelectric PbTiO/sub 3/ films 0.5- to 2.0- mu m thick were prepared by the metalloorganic decomposition (MOD) process using multilayer spinning with firing temperatures of 490-630 degrees C. The temperature dependence of the dielectric constant was found to be a function of the c/a ratio, which could be modified by control of either the single-layer thickness or the strength of the electric field during film preparation near the Curie temperature. The films were near theoretical density and defect-free over 2 cm*2 cm areas.<>Keywords
This publication has 17 references indexed in Scilit:
- Kinetics of BaTiO3and PbTiO3Formation from Metallo‐organic PrecursorsJournal of the American Ceramic Society, 1986
- Metallo-Organic Decomposition (MOD) Films for Electronic PackagingMRS Proceedings, 1986
- Synthesis of Metallo-Organic Compounds for Mod Powders and FilmsMRS Proceedings, 1985
- Chemical Vapor Deposition of PbTiO3 Thin FilmJapanese Journal of Applied Physics, 1983
- Structure and electrical properties of amorphous PbTiO3 thin films sputtered on cooled substratesJournal of Non-Crystalline Solids, 1982
- Preparation of PbTiO3Ferroelectric Thin Film by RF SputteringJapanese Journal of Applied Physics, 1979
- Effects of Additives on Piezoelectric and Related Properties of PbTiO3CeramicsJapanese Journal of Applied Physics, 1972
- Electromechanical Properties of PbTiO3 Ceramics Containing La and MnThe Journal of the Acoustical Society of America, 1971
- Piezoelectric Properties of Modified PbTiO3 CeramicsJapanese Journal of Applied Physics, 1968
- Studies on Lead Titanate Ceramics Containing Niobium or TantalumJournal of the American Ceramic Society, 1960