Replicated optical MEMS in sol-gel materials
- 3 June 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical MEMS fabricated in silicon using lithographic and micro-machining technologies. The use of UV-curable sol-gel materials enables optical features such as micro-lenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost, high resolution mass-production technology. The paper describes progress in work aimed at investigating the potential of this approach. Author(s) Gale, Michael T. Centre Suisse d''Electronique et de Microtechnique SA, Zurich, Switzerland Obi, S. ; de Rooij, N.Keywords
This publication has 1 reference indexed in Scilit:
- ORMOCER®s for Optical Interconnection TechnologyJournal of Sol-Gel Science and Technology, 2001