Non-equilibrium electronic and vibrational kinetics in H2-N2and H2discharges
- 1 May 1995
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 4 (2) , 268-280
- https://doi.org/10.1088/0963-0252/4/2/011
Abstract
In the first section of this paper, the results from a systematic theoretical study describing the electron kinetics and the heavy particle kinetics of H2 in glow discharges through H2-N2 mixtures are presented. The results show that the collisional interactions between the vibronic states of H2, N2 are highly nonlinear, and that they strongly affect the dissociation, ionization, gas heating, discharge impedance and power loading. It is shown that at low discharge currents (1 Torr), and approximately=10-80%H2-N2 gas mixture composition, quenching of the excited electronic states of N2 by H2 is the dominant dissociation channel of H2 in %H2-%N2 discharges. The results further demonstrate that the dissociation balance and the electronic/ionization balance in these molecular glow discharges are strongly coupled and that neither can be studied independently of the other. In the second section of this study, a revised kinetic analysis of the formation of atomic H- negative ions in volume sources is presented. A new process for the production of H- is introduced in the analyses. Using data derived from recent experiments, it is shown that the contribution to H- formation from dissociative attachment to the high Rydberg states of H2 is comparable to (or greater than) that from H2(X1 Sigma g+,V). This additional source term for H- production may resolve some of the problems in understanding the H- densities in low-pressure H2 plasmas.Keywords
This publication has 33 references indexed in Scilit:
- Electron and vibrational kinetics in an N2-H2glow discharge with application to surface processesJournal of Physics D: Applied Physics, 1993
- Electron energy distribution functions and vibrational population densities of excited electronic states in DC discharges through nitrogenJournal of Physics D: Applied Physics, 1990
- Non-equilibrium kinetics in nitrogen discharges: a comparative analysis of two theoretical approachesJournal of Physics D: Applied Physics, 1990
- ELENDIF: A time-dependent Boltzmann solver for partially ionized plasmasComputer Physics Communications, 1990
- Electron and vibrational kinetics in the hydrogen positive columnJournal of Physics D: Applied Physics, 1989
- Energy balance in a nonequilibrium weakly ionized nitrogen dischargeJournal of Applied Physics, 1986
- Model for a glow discharge in flowing nitrogenJournal of Applied Physics, 1985
- Properties of the positive column of a glow discharge in flowing hydrogenJournal de Physique, 1981
- Electron Energy Distributions and Collision Rates in Electrically Excited, CO, and CPhysical Review A, 1970
- Vibrational Relaxation of N2 in N2–H2 MixturesThe Journal of Chemical Physics, 1967