Plasma diamond deposition from CH4H2(O2Ar) in relation to kinetic calculations
- 25 September 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (9) , 933-944
- https://doi.org/10.1016/0925-9635(92)90114-4
Abstract
No abstract availableKeywords
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