Velocity Filtering for Secondary Ion Quadrupole Mass Spectrometer
- 1 September 1973
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (9) , 1403-1404
- https://doi.org/10.1063/1.1686398
Abstract
A simple method of secondary ion velocity filtering for sputter ion mass spectroscopy is described. The experiments on Ni surfaces show that the method allows sorting of secondary ions according to their adsorption energies and thereby enhances the analytic capabilities of the spectrometer.Keywords
This publication has 8 references indexed in Scilit:
- An Analytical System for Secondary Ion Mass Spectrometry in Ultra High VacuumJournal of Vacuum Science and Technology, 1972
- Analysis of surfaces utilizing sputter ion source instrumentsSurface Science, 1971
- Tandem Mass Spectrometer for Secondary Ion StudiesReview of Scientific Instruments, 1971
- Analytic methods for the ion microprobe mass analyzer. Part II.International Journal of Mass Spectrometry and Ion Physics, 1970
- Surface Composition Analysis by Binary Scattering of Noble Gas IonsJournal of Vacuum Science and Technology, 1970
- Surface Quantum Transport PhenomenaJournal of Vacuum Science and Technology, 1970
- Progress in analytic methods for the ion microprobe mass analyzerInternational Journal of Mass Spectrometry and Ion Physics, 1969
- SECONDARY ION EMISSIONSoviet Physics Uspekhi, 1967