Role of Relaxation in Epitaxial Growth: A Molecular-Dynamics Study
- 5 August 1985
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 55 (6) , 604-606
- https://doi.org/10.1103/physrevlett.55.604
Abstract
The epitaxial growth of a Lennard-Jones system is studied as a function of substrate temperature and deposition rate. For all substrate temperatures the growth is into well-ordered layers. Layers become fully completed at intermediate . At very low the layers contain defects and voids; however, the atoms are still arranged in close-packed islands within the layers.
Keywords
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