A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon
- 20 June 2003
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (5) , 721-725
- https://doi.org/10.1088/0960-1317/13/5/326
Abstract
No abstract availableKeywords
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