Low Pressure Deposition of Silicon Nitride by SiCl4 and NH 3 Reaction

• 1 March 1981
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 128  (3) , 708-709
• https://doi.org/10.1149/1.2127487

Abstract

Keywords

• LOW PRESSURE