Correlation between electrostatic scan pattern and local dose nonuniformities
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1) , 291-294
- https://doi.org/10.1016/0029-554x(81)90157-9
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Industrial Ion Implantation MachinesIEEE Transactions on Manufacturing Technology, 1975