Fabrication technologies for microsystems utilizing photoetchable glass
- 1 January 1996
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 30 (1-4) , 497-504
- https://doi.org/10.1016/0167-9317(95)00295-2
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Photoetchable glass for microsystems: tips for atomic force microscopyJournal of Micromechanics and Microengineering, 1993