Kathodenzerstäubung und ihre Anwendung in der Dünnschichttechnologie
- 1 January 1990
- journal article
- research article
- Published by Wiley in Vakuum in Forschung und Praxis
- Vol. 2 (1) , 23-28
- https://doi.org/10.1002/vipr.19900020107
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- VII. On the electro-chemical polarity of gasesPhilosophical Transactions of the Royal Society of London, 1852