Study of the oxidation of aluminium nitride coatings at high temperature
- 1 May 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 260 (1) , 38-46
- https://doi.org/10.1016/0040-6090(94)06480-6
Abstract
No abstract availableKeywords
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- Kinetics and initial stages of oxidation of aluminum nitride: Thermogravimetric analysis and x-ray photoelectron spectroscopy studyJournal of Vacuum Science & Technology A, 1987
- Some properties of chemically vapor deposited films of AlxOyNz on siliconJournal of Electronic Materials, 1975