Optical properties of transparent and heat reflecting ZnO:Al films made by reactive sputtering
- 20 July 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (3) , 149-151
- https://doi.org/10.1063/1.99008
Abstract
Heavily doped ZnO:Al films were made by dual-target reactive magnetron sputtering. Spectrophotometry in the 0.3–50 μm range proved that the films were suitable for energy-efficient windows. The optical data could be reconciled with a theory involving a free-electron gas damped by ionized impurity scattering.Keywords
This publication has 11 references indexed in Scilit:
- Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windowsJournal of Applied Physics, 1986
- Carrier scattering and transport in semiconductors treated by the energy-loss methodJournal of Physics C: Solid State Physics, 1986
- Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1985
- Spectrally Selective Coatings for Energy Efficiency and Solar ApplicationsPhysica Scripta, 1985
- Electroless deposition of cadmium stannate, zinc oxide, and aluminum-doped zinc oxide filmsJournal of Applied Physics, 1985
- Highly conductive and transparent ZnO thin films prepared by r.f. magnetron sputtering in an applied external d.c. magnetic fieldThin Solid Films, 1985
- Band-gap widening in heavily Sn-dopedPhysical Review B, 1984
- Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1984
- Optical properties of transparent and heat-reflecting indium tin oxide films: The role of ionized impurity scatteringApplied Physics Letters, 1984
- High quality transparent heat reflectors of reactively evaporated indium tin oxideApplied Physics Letters, 1982