3C-SiC Single-Crystal Films Grown on 6-Inch Si Substrates

• 1 July 1997
• journal article
• Published by Wiley in Physica Status Solidi (b)
• Vol. 202  (1) , 335-358
• https://doi.org/10.1002/1521-3951(199707)202:1<335::aid-pssb335>3.0.co;2-y

Abstract

Keywords

• SI SUBSTRATES
• 3C SIC
• GROWN
• C2H2
• SIC FILMS