Stresses in Multilayered Thin Films on a Thick Substrate
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Stresses in Bi-Metal ThermostatsJournal of Applied Mechanics, 1986
- New approach to the high quality epitaxial growth of lattice-mismatched materialsApplied Physics Letters, 1986
- Simple stress formula for multilayered thin films on a thick substrateJournal of Applied Physics, 1982
- Analysis of stress and strain distribution in thin films and substratesJournal of Applied Physics, 1976
- Interface stress of AlxGa1−xAs–GaAs layer structuresJournal of Applied Physics, 1973