Deposition and characterization of ternary nitrides

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Abstract
Hard coatings of titanium nitride, titanium carbide, and aluminum oxide are the materials most widely used for improved performance and productivity on high-speed steel and cemented carbide tools. However, very little effort has been focused on the deposition of ternary nitrides. This paper presents the deposition and characterization of ternary nitrides of (Ti, Zr) and (Ti, Al) using cathodic arc plasma deposition process. The films were analyzed in terms of surface topography, composition, and mechanical properties. These coatings were also evaluated for wear applications and decorative properties. The results are also compared with TiN and (Ti–6Al–4V)N films obtained by the same process.

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