Surface pre-treatment dependent formation of molybdenum nitride by low energy N+2 ion bombardment
- 31 July 1982
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 11-12, 222-228
- https://doi.org/10.1016/0378-5963(82)90069-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxidesThe Journal of Chemical Physics, 1978
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