Polysilicon photonic resonators for large-scale 3D integration of optical networks

1 January 2007

journal article
Published by Optica Publishing Group in Optics Express

Vol. 15 (25) , 17283-17290
https://doi.org/10.1364/oe.15.017283

Abstract

We demonstrate optical microresonators in polycrystalline silicon with quality factors of 20,000. We also demonstrate polycrystalline resonators vertically coupled to crystalline silicon waveguides. Electrically active photonic structures fabricated in deposited polysilicon layers would enable the large-scale integration of photonics with current CMOS microelectronics.

Keywords

CHANNELED WAVEGUIDES
MATERIAL PROPERTIES
OPTICAL MATERIALS
RING RESONATORS
THIN FILM TRANSISTORS
THIN FILMS

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