Contamination Lithography For The Fabrication Of Zone Plate X-Ray Lenses

• 20 June 1985
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• Vol. 0537, 213
• https://doi.org/10.1117/12.947504

Abstract

Keywords

• CONTAMINATION
• FABRICATION
• LITHOGRAPHY
• LENSES
• CARBON