Apparatus for Determining Temperature Profiles in Microstructures
- 1 April 1963
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 34 (4) , 360-361
- https://doi.org/10.1063/1.1718364
Abstract
A practical infrared sensing apparatus has been developed to profile the temperature distribution of small complex structures without affecting the temperature distribution by the temperature sensing element. The sensitivity is 60°C for some materials, and the resolution is 1.3 mils.Keywords
This publication has 2 references indexed in Scilit:
- Infrared Photodetectors: A Review of Operational DetectorsApplied Optics, 1962
- Phenomenological Description of the Response and Detecting Ability of Radiation DetectorsProceedings of the IRE, 1959