S.A.W. resonators at 1.29 GHz with Q values approaching the material limit
- 7 June 1979
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 15 (12) , 339-340
- https://doi.org/10.1049/el:19790241
Abstract
Two-port s.a.w. resonator filters have been fabricated at 1.29 GHz with Q values up to 7050. This experimental unloaded Q is about 87% of the material limit of 8100 at this frequency. Details of the device design are given and salient features of the fabrication process are outlined. The experimental results are discussed, demonstrating sufficient knowledge to permit fabrication of useful devices at supra-GHz frequencies.Keywords
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