SiO2-induced silicon emitter emission instability
- 1 March 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (2) , 697-699
- https://doi.org/10.1116/1.587373
Abstract
An emission instability attributed to an oxide layer on a silicon emitter tip surface has been characterized. The instability leads to a current runaway which often results in device failure. When device failure does not occur, the instability is a one time event while the device remains in a vacuum environment. The magnitude of the instability increases with increasing oxide thickness and can be effectively eliminated by etching in buffered HF immediately before testing or device packaging.Keywords
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